Title: Low- temperature PZT thin-film ferroelectric memories fabricated on SiO2/Si and glass substrates Authors: D.H. Minh N.V. Lo N.H. Duc B.N.Q. Trinh Keywords: PZT;Thin-film transistor;Ferroelectric;Sol-gel;ITO Issue Date: 2016 Publisher: ĐHQGHN Abstract: In a ferroelectric-gate thin film transistor memory (FGT) type structure, the gate-insulator layer is extremely important for inducing the charge when accumulating or depleting. We concentrated on the application of low-temperature PZTfilms crystallized at 450, 500 and 550 C, instead of at conventional high temperatures ( 600 C). Investigation of the crystalline structure and electrical properties indicated that the PZTfilm, crystallized at 500 C, was suitable for FGT fabrication because of a high (111) orien-tation, large remnant polarization of 38 aC/cm 2 on SiO2/Si substrate and 17.8 aC/cm 2 on glass, and low leakage current of 10- 6A/cm 2 . In sequence, we successfully fabrica...